Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/03/2013
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Application #:
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13494466
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Filing Dt:
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06/12/2012
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Publication #:
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Pub Dt:
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01/31/2013
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Inventors:
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Tooru ABE, Osamu Wakabayashi
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Title:
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CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD FOR CONTROLLING THE EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400 YOKOKURASHINDEN, OYAMA-SHI |
| TOCHIGI, JAPAN 323-0819 |
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| MCDERMOTT WILL & EMERY LLP |
| 600 13TH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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