Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/10/2013
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Application #:
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11922997
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Filing Dt:
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12/28/2007
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Publication #:
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Pub Dt:
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09/10/2009
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Inventors:
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Yuichi Nasu, Hirotaka Katou, Kazuhiro Narahara, Hideyuki Matsunaga
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Title:
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Method and Apparatus for Manufacturing Semiconductor Wafer
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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25-1, SHINOMIYA 3-CHOME HIRATSUKASHI |
KANAGAWA, JAPAN 254-0014 |
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GERALD T. SHEKLETON |
WELSH & KATZ, LTD. |
22ND FLOOR |
120 S. RIVERSIDE PLAZA |
CHICAGO, IL 60606 |
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