Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12956086
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Filing Dt:
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11/30/2010
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Publication #:
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Pub Dt:
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06/23/2011
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Inventors:
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Hirohisa Hirayanagi, Ayumu Miyoshi, Einstein Noel Abarra
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Title:
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ION BEAM GENERATOR, AND SUBSTRATE PROCESSING APPARATUS AND PRODUCTION METHOD OF ELECTRONIC DEVICE USING THE ION BEAM GENERATOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-1, KURIGI 2-CHOME, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA 215-8550, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 1290 AVENUE OF THE AMERICAS |
| NEW YORK, NEW YORK 10104-3800 |
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