Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12836558
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Filing Dt:
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07/14/2010
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Inventor:
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Shouhong Tang
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Title:
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METHOD AND APPARATUS FOR MEASURING THE SHAPE AND THICKNESS VARIATION OF A WAFER BY TWO SINGLE-SHOT PHASE-SHIFTING INTERFEROMETERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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DEBORAH WENOCUR/KLA TENCOR |
4057 AMARANTA AVENUE |
PALO ALTO, CA 94306 |
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