Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12884568
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Filing Dt:
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09/17/2010
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Publication #:
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Pub Dt:
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04/07/2011
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Inventors:
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Kazuhide ASAI, Hiroyuki IWAKURA, Kazuyoshi YAMAMOTO
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Title:
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SUBSTRATE PROCESSING SYSTEM, GROUP MANAGING APPARATUS, AND METHOD OF ANALYZING ABNORMAL STATE
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Assignment:
1
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 3-4 KANDA-KAJICHO, CHIYODA-KU |
| TOKYO, JAPAN |
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| BRUNDIDGE & STANGER, P.C. |
| 1925 BALLENGER AVENUE, SUITE 560 |
| ALEXANDRIA, VA 22314 |
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