Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
Total Assignments:
2
|
Patent #:
|
|
Issue Dt:
|
10/15/2013
|
Application #:
|
13223833
|
Filing Dt:
|
09/01/2011
|
Publication #:
|
|
Pub Dt:
|
03/07/2013
| | | | |
Inventors:
|
Yan SHAO, Martin D. TABAT, Christopher K. OLSEN, Ruairidh MACCRIMMON
|
Title:
|
GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS
|
|
Assignment:
1
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
37 MANNING ROAD |
BILLERICA, MASSACHUSETTS 01821 |
|
|
|
TOKYO ELECTRON U.S. HOLDINGS, INC. |
2545 W. FRYE RD. |
SUITE 1 |
CHANDLER, AZ 85224 |
|
|
Assignment:
2
|
|
|
|
MERGER (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
3455 LYMAN BLVD. |
CHASKA, MINNESOTA 55318 |
|
|
|
TOKYO ELECTRON U.S. HOLDINGS, INC. |
2400 GROVE BLVD |
AUSTIN, TX 78741 |
|
|
Search Results as of:
05/13/2024 04:24 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|