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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8573151
Issue Dt:
11/05/2013
Application #:
12393724
Filing Dt:
02/26/2009
Publication #:
20090218044
Pub Dt:
09/03/2009
Inventors:
Tadahiro OHMI, Masaki HIRAYAMA, Tetsuya GOTO, Masafumi KITANO, Kohei WATANUKI et al
Title:
MICROWAVE PLASMA PROCESSING APPARATUS, DIELECTRIC WINDOW FOR USE IN THE MICROWAVE PLASMA PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING THE DIELECTRIC WINDOW
Assignment: 1
Reel/Frame:
022318/0214Recorded: 02/26/2009Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
OHMI, TADAHIRO
Exec Dt:
02/10/2009
HIRAYAMA, MASAKI
Exec Dt:
02/05/2009
GOTO, TETSUYA
Exec Dt:
02/06/2009
SHIRAI, YASUYUKI
Exec Dt:
02/05/2009
KITANO, MASAFUMI
Exec Dt:
02/06/2009
WATANUKI, KOHEI
Exec Dt:
02/06/2009
MATSUOKA, TAKAAKI
Exec Dt:
02/05/2009
MURAKAWA, SHIGEMI
Exec Dt:
02/07/2009
Assignee:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
CANTOR COLBURN LLP
20 CHURCH STREET, 22ND FLOOR
HARTFORD, CT 06103
Assignment: 2
Reel/Frame:
022474/0853Recorded: 03/31/2009Pages: 9
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE ONE ASSIGNEE WAS OMITTED PREVIOUSLY RECORDED ON REEL 022318 FRAME 0214. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
OHMI, TADAHIRO
Exec Dt:
02/10/2009
HIRAYAMA, MASAKI
Exec Dt:
02/05/2009
GOTO, TETSUYA
Exec Dt:
02/06/2009
SHIRAI, YASUYUKI
Exec Dt:
02/05/2009
KITANO, MASAFUMI
Exec Dt:
02/06/2009
WATANUKI, KOHEI
Exec Dt:
02/06/2009
MATSUOKA, TAKAAKI
Exec Dt:
02/05/2009
MURAKAWA, SHIGEMI
Exec Dt:
02/07/2009
Assignees:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
TOHOKU UNIVERSITY
1-1, KATAHIRA 2-CHOME, AOBA-KU
MIYAGI
SENDAI CITY, JAPAN 980-8577
Correspondent:
CANTOR COLBURN LLP
20 CHURCH STREET, 22ND FLOOR
HARTFORD, CT 06103

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