Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/12/2013
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Application #:
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12000670
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Filing Dt:
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12/14/2007
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Publication #:
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Pub Dt:
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07/10/2008
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Inventors:
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Yasushi Takiguchi, Taro Yamamoto, Dai Kumagai, Naoto Yoshitaka, Takahiro Kitano et al
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Title:
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Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| DENNIS C. RODGERS |
| SMITH, GAMBRELL & RUSSELL, LLP |
| 1130 CONNECTICUT AVENUE - SUITE 1130 |
| WASHINGTON, DC 20036 |
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