Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2013
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Application #:
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12992971
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Filing Dt:
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11/16/2010
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Publication #:
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Pub Dt:
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03/17/2011
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Inventors:
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Hiroaki Takechi, Norio Takahashi, Wataru Kiyosawa, Atsuki Komiya, Shigenao Maruyama
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Title:
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APPARATUS AND METHOD FOR CONTROLLING TEMPERATURE OF SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-25-1 SHINOMIYA, |
| HIRATSUKA-SHI, KANAGAWA, JAPAN 254-8543 |
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| 2-1-1 KATAHIRA, AOBA-KU, |
| SENDAI-SHI, MIYAGI, JAPAN 980-8577 |
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| KRATZ, QUINTOS & HANSON, LLP |
| 4TH FLOOR |
| 1420 K STREET, N.W. |
| WASHINGTON, DC 20005 |
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