Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/10/2013
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Application #:
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13196530
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Filing Dt:
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08/02/2011
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Publication #:
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Pub Dt:
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12/15/2011
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Inventors:
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Shinji TARUTANI, Hideaki TSUBAKI, Kazuyoshi MIZUTANI, Kenji WADA, Wataru HOSHINO
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Title:
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PATTERN FORMING METHOD, AND RESIST COMPOSITION, DEVELOPER AND RINSING SOLUTION USED IN THE PATTERN FORMING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 26-30, NISHIAZABU 2-CHOME |
| MINATO-KU |
| TOKYO, JAPAN |
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| BRETT SYLVESTER |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20037 |
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