Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/24/2013
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Application #:
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13048612
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Filing Dt:
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03/15/2011
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Publication #:
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Pub Dt:
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08/25/2011
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Inventors:
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Tsuyoshi SATO, Hiroyasu Kondo, Naoaki Sakurai, Katsuyuki Soeda, Shuichi Kimura et al
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Title:
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FILM FORMING APPARATUS, FILM FORMING METHOD, AND SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8001 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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