Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/07/2014
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Application #:
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13572720
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Filing Dt:
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08/13/2012
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Inventors:
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Thomas W. Dyer, Tze-Man Ko, Yiheng Xu, Shaoning Yao
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Title:
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STRUCTURE AND METHOD FOR DETECTING DEFECTS IN BEOL PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORP - FISHKILL DRAFTING CENTER |
| 2070 ROUTE 52 |
| BLDG 321 M/D 482 |
| HOPEWELL JUNCTION, NY 12533 |
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