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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8629973
Issue Dt:
01/14/2014
Application #:
12789795
Filing Dt:
05/28/2010
Publication #:
20100302525
Pub Dt:
12/02/2010
Inventors:
Richard Carl ZIMMERMAN, Hendrikus Robertus Marie Van Greevenbroek et al
Title:
LITHOGRAPHIC APPARATUS AND METHOD FOR ILLUMINATION UNIFORMITY CORRECTION AND UNIFORMITY DRIFT COMPENSATION
Assignment: 1
Reel/Frame:
024763/0455Recorded: 07/29/2010Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Exec Dt:
06/11/2010
CSISZAR, SZILARD ISTVAN
Exec Dt:
06/11/2010
Assignee:
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL - 5504 DR
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005
Assignment: 2
Reel/Frame:
024763/0503Recorded: 07/29/2010Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ZIMMERMAN, RICHARD CARL
Exec Dt:
06/17/2010
KOCHERSPERGER, PETER C.
Exec Dt:
06/17/2010
DOWNEY, TODD R.
Exec Dt:
06/17/2010
STONE, ELIZABETH
Exec Dt:
06/17/2010
KUBICK, FREDERICK
Exec Dt:
06/18/2010
VLADIMIRSKY, OLGA
Exec Dt:
05/17/2010
Assignee:
ASML HOLDING N.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL - 5504 DR
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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