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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/04/2014
Application #:
12758167
Filing Dt:
04/12/2010
Publication #:
Pub Dt:
10/21/2010
Inventors:
DONGWON CHOI, DONG HYUNG LEE, TZE POON, MANOJ VELLAIKAL, PETER PORSHNEV, MAJEED FOAD
Title:
ENHANCED SCAVENGING OF RESIDUAL FLUORINE RADICALS USING SILICON COATING ON PROCESS CHAMBER WALLS
Assignment: 1
Reel/Frame:
024602/0515Recorded: 06/28/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/14/2010
Exec Dt:
04/14/2010
Exec Dt:
04/15/2010
Exec Dt:
04/15/2010
Exec Dt:
04/20/2010
Exec Dt:
04/26/2010
Assignee:
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
MOSER IP LAW GROUP / APPLIED MATERIALS,
1030 BROAD STREET
SUITE 203
SHREWSBURY, NJ 07702

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