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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/11/2014
Application #:
12797999
Filing Dt:
06/10/2010
Publication #:
Pub Dt:
09/30/2010
Inventors:
LING CHEN, Vincent Ku, Norman Nakashima, Hua Chung, Alan Ouye, Dien-Yeh Wu
Title:
GAS DELIVERY APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION
Assignment: 1
Reel/Frame:
024534/0001Recorded: 06/14/2010Pages: 15
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/22/2002
Exec Dt:
02/21/2002
Exec Dt:
02/21/2002
Exec Dt:
02/25/2002
Exec Dt:
02/21/2002
Exec Dt:
02/21/2002
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
B. TODD PATTERSON
PATTERSON & SHERIDAN, LLP
3040 POST OAK BLVD, SUITE 1500
HOUSTON, TX 77056

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