Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/18/2014
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Application #:
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12393871
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Filing Dt:
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02/26/2009
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Publication #:
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Pub Dt:
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09/03/2009
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Inventor:
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Kiyoshi Takagi
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Title:
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POSITION CONTROL APPARATUS INCLUDING ITERATIVE LEARNING CIRCUIT, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING DEVICE, AND ITERATIVE LEARNING METHOD FOR USE IN POSITION CONTROL APPARATUS HAVING ITERATIVE LEARNING CIRCUIT INCLUDING LEARNING FILTER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN 146-8501 |
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| CANON KABUSHIKI KAISHA |
| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, 146-8501 JAPAN |
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