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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/08/2014
Application #:
12871714
Filing Dt:
08/30/2010
Publication #:
Pub Dt:
03/01/2012
Inventors:
Alain Duboust, Wen-Chiang Tu, Jimin Zhang, Huyen Tran, David H. Mai, Boguslaw A. Swedek et al
Title:
ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING
Assignment: 1
Reel/Frame:
025868/0394Recorded: 02/26/2011Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/23/2011
Exec Dt:
02/09/2011
Exec Dt:
02/25/2011
Exec Dt:
02/10/2011
Exec Dt:
02/10/2011
Exec Dt:
02/11/2011
Exec Dt:
02/09/2011
Exec Dt:
02/09/2011
Exec Dt:
02/09/2011
Exec Dt:
02/09/2011
Assignee:
P. O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS
P.O. BOX 450A
SANTA CLARA, CA 95052

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