Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/22/2014
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Application #:
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12987948
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Filing Dt:
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01/10/2011
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Publication #:
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Pub Dt:
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05/05/2011
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Inventors:
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Sang In Yi, Kelvin Chan, Thomas Nowak, Alexandros T. Demos
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Title:
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SUPERIMPOSITION OF RAPID PERIODIC AND EXTENSIVE POST MULTIPLE SUBSTRATE UV-OZONE CLEAN SEQUENCES FOR HIGH THROUGHPUT AND STABLE SUBSTRATE TO SUBSTRATE PERFORMANCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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B. TODD PATTERSON |
PATTERSON & SHERIDAN, LLP |
3040 POST OAK BLVD |
SUITE 1500 |
HOUSTON, TX 77056 |
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