Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/29/2014
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Application #:
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12915345
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Filing Dt:
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10/29/2010
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Publication #:
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Pub Dt:
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11/03/2011
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Inventors:
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JAMES P. CRUSE, JOHN W. LANE, MARIUSCH GREGOR, DUC BUCKIUS, BERRIN DARAN, MING XU et al
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Title:
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METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PAULINE S. FISCHER |
| APPLIED MATERIALS, INC. |
| P.O. BOX 450 A |
| SANTA CLARA, CA 95052 |
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