Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/29/2014
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Application #:
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13648669
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Filing Dt:
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10/10/2012
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Publication #:
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Pub Dt:
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02/07/2013
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Inventors:
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Hajime YAMAMOTO, Hiroyuki IMAI
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Title:
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VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURGI, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA-KEN, JAPAN |
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| BUCHANAN INGERSOLL & ROONEY PC |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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