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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8741097
Issue Dt:
06/03/2014
Application #:
12913162
Filing Dt:
10/27/2010
Publication #:
20110094996
Pub Dt:
04/28/2011
Inventors:
Yohei YAMAZAWA, Chishio KOSHIMIZU, Kazuki DENPOH, Masashi SAITO, Jun YAMAWAKU
Title:
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Assignment: 1
Reel/Frame:
025595/0961Recorded: 01/06/2011Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
YAMAZAWA, YOHEI
Exec Dt:
12/08/2010
KOSHIMIZU, CHISHIO
Exec Dt:
12/08/2010
SAITO, MASASHI
Exec Dt:
12/08/2010
DEMPOH, KAZUKI
Exec Dt:
12/08/2010
YAMAWAKU, JUN
Exec Dt:
12/08/2010
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
MIHOKO SHIRAI
1940 DUKE STREET
ALEXANDRIA, VA 22314
Assignment: 2
Reel/Frame:
025743/0311Recorded: 02/04/2011Pages: 6
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE 4TH ASSIGNOR'S NAME PREVIOUSLY RECORDED ON REEL 025595 FRAME 0961. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
YAMAZAWA, YOHEI
Exec Dt:
12/08/2010
KOSHIMIZU, CHISHIO
Exec Dt:
12/08/2010
SAITO, MASASHI
Exec Dt:
12/08/2010
DENPOH, KAZUKI
Exec Dt:
12/08/2010
YAMAWAKU, JUN
Exec Dt:
12/08/2010
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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