Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/29/2014
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Application #:
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11352307
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Filing Dt:
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02/13/2006
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Publication #:
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Pub Dt:
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08/16/2007
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Inventors:
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Daxing Ren, Enrico Magni, Eric Lenz, Ren Zhou
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Title:
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Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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PETER K. SKIFF |
BUCHANAN INGERSOLL PC |
BURNS, DOANE, SWECKER & MATHIS |
P.O. BOX 1404 |
ALEXANDRIA, VIRGINIA 22313-1404 |
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