Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/19/2014
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Application #:
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12533318
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Filing Dt:
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07/31/2009
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Publication #:
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Pub Dt:
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02/04/2010
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Inventors:
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Bon-Woong Koo, Christopher R. Campbell, Craig R. Chaney, Robert Lindberg et al
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Title:
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ION SOURCE AND A METHOD FOR IN-SITU CLEANING THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| SCOTT R. FABER |
| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930 |
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