Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/26/2014
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Application #:
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13423946
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Filing Dt:
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03/19/2012
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Publication #:
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Pub Dt:
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09/27/2012
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Inventors:
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Yasushi Higuchi, Toshimitsu Uehigashi, Kazuhiro Sonoda, Harunori Ushikawa, Naoki Hanada
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Title:
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METHOD FOR FORMING NISI FILM, METHOD FOR FORMING SILICIDE FILM, METHOD FOR FORMING METAL FILM FOR USE IN SILICIDE-ANNEALING, APPARATUS FOR VACUUM PROCESSING AND FILM-FORMING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2500, HAGISONO, CHIGASAKI-SHI |
| KANAGAWA, JAPAN 253-8543 |
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| ARENT FOX LLP |
| 1050 CONNECTICUT AVENUE, N.W. |
| SUITE 400 |
| WASHINGTON, DC 20036 |
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