Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/02/2014
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Application #:
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13169749
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Filing Dt:
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06/27/2011
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Publication #:
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Pub Dt:
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01/26/2012
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Inventors:
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Wilhelmus Franciscus Johannes SIMONS et al
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Title:
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POSITION CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD TO CONTROL A POSITION OF A MOVABLE OBJECT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| JACK S. BARUFKA |
| 1650 TYSONS BOULEVARD, SUITE 1400 |
| MCLEAN, VA 22102 |
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