Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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09/09/2014
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Application #:
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13187166
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Filing Dt:
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07/20/2011
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Publication #:
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Pub Dt:
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11/10/2011
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Inventors:
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Andrew John HARPHAM, Paul John Shechter, Paul Alan Stockman
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Title:
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VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHERTSEY ROAD |
| WINDLESHAM |
| SURREY, UNITED KINGDOM GU20 6HJ |
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| PILLSBURY WINTRHOP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KIRKLAND & ELLIS INTERNATIONAL LLP |
| 30 ST. MARY AXE |
| LONDON, UNITED KINGDOM EC3A 8AF |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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