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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8836929
Issue Dt:
09/16/2014
Application #:
13713870
Filing Dt:
12/13/2012
Publication #:
20140022524
Pub Dt:
01/23/2014
Inventors:
Uwe Schellhorn, Albrecht Ehrmann, Markus Goeppert, Ulrich Wegmann, Joachim Stuehler et al
Title:
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID
Assignment: 1
Reel/Frame:
029471/0246Recorded: 12/14/2012Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WEGMANN, ULRICH
Exec Dt:
09/08/2008
SCHELLHORN, UWE
Exec Dt:
09/09/2008
STUEHLER, JOACHIM
Exec Dt:
09/24/2008
EHRMANN, ALBRECHT
Exec Dt:
09/22/2008
SCHRIEVER, MARTIN
Exec Dt:
09/09/2008
GOEPPERT, MARKUS
Exec Dt:
09/10/2008
HAIDNER, HELMUT
Exec Dt:
09/09/2008
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
029480/0840Recorded: 12/17/2012Pages: 6
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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