Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/30/2014
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Application #:
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12974123
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Filing Dt:
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12/21/2010
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Publication #:
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Pub Dt:
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06/30/2011
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Inventors:
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Tadakazu SONE, Yasuyuki MOTOSHIMA, Yoichi SHIOKAWA, Toru MARUYAMA, Katsutoshi ONO
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Title:
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SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPARATUS FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD USED IN POLISHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU, |
| TOKYO, JAPAN |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| 1030 15TH STREET NW |
| SUITE 400 EAST |
| WASHINGTON, DC 20005 |
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