Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/07/2014
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Application #:
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13659555
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Filing Dt:
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10/24/2012
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Publication #:
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Pub Dt:
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05/23/2013
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Inventors:
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Steven VERHAVERBEKE, Roman GOUK, Li-Qun XIA, Mei-yee SHEK, Yu JIN
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Title:
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APPARATUS AND METHODS FOR SILICON OXIDE CVD RESIST PLANARIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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KAY PRUITT |
3040 POST OAK BLVD |
SUITE 1500 |
HOUSTON, TX 77056 |
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