Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/28/2014
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Application #:
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13573354
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Filing Dt:
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09/10/2012
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Publication #:
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Pub Dt:
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01/24/2013
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Inventors:
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Jennifer Y. Sun, Kenneth S. Collins, Ren-Guan Duan, Senh Thach, Thomas Graves, Jie Yuan et al
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Title:
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Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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SHIRLEY L. CHURCH, ESQ. |
P.O. BOX 81146 |
SAN DIEGO, CA 92138 |
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