Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/28/2014
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Application #:
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13220084
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Filing Dt:
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08/29/2011
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Publication #:
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Pub Dt:
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03/08/2012
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Inventors:
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Sang-Wuk Park, Geum-Jung Seong, Kye-Hyun Baek, Yong-Jin Kim, Chan-Mi Lee
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Title:
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ETCHING SYSTEM AND METHOD OF CONTROLLING ETCHING PROCESS CONDITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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416, MAETAN-DONG, YEONGTONG-GU |
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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HARNESS, DICKEY & PIERCE, P.L.C. |
P.O. BOX 8910 |
RESTON, VA 20195 |
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