Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2014
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Application #:
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13562950
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Filing Dt:
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07/31/2012
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Publication #:
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Pub Dt:
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05/23/2013
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Inventors:
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Shinji NAGAI, Junichi FUJIMOTO, Kouji ASHIKAWA
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Title:
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CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400 YOKOKURASHINDEN, OYAMA-SHI |
| TOCHIGI, JAPAN 323-8558 |
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| MCDERMOTT WILL & EMERY LLP |
| 600 13TH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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