Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2014
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Application #:
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13823685
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Filing Dt:
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03/14/2013
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Publication #:
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Pub Dt:
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07/18/2013
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Inventors:
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Hua-Yu Liu, Jiangwei Li, Luoqi Chen, Wei Liu, Jiong Jiang
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Title:
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CORRECTION FOR FLARE EFFECTS IN LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS 5504 DR |
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| MARK J. DANIELSON |
| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| 2550 HANOVER STREET |
| PALO ALTO, CA 94304 |
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