Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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12718037
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Filing Dt:
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03/05/2010
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Publication #:
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Pub Dt:
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06/24/2010
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Inventors:
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Matthias SCHALLER, Uwe SCHULZE, Mathias BARANYAI
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Title:
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METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY GAS FLOW CONTROL ON THE BASIS OF CD MEASUREMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 3453, ONE AMD PLACE |
| SUNNYVALE, CALIFORNIA 94088-3453 |
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| DAVIDSON SHEEHAN LLP |
| 700 LAVACA ST. |
| SUITE 1400-2323 |
| AUSTIN, TX 78701 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121 W. LONG LAKE ROAD |
| SUITE 300 |
| BLOOMFIELD HILLS, MICHIGAN 48304 |
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| SEAN ANDERSON |
| 1526 GILPIN AVENUE |
| WILMINGTON, DE 19806 |
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