Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/09/2014
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Application #:
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13871297
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Filing Dt:
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04/26/2013
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Publication #:
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Pub Dt:
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10/31/2013
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Inventors:
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Kazuya TAKAHASHI, Yoshikazu FURUSAWA, Mitsuhiro OKADA
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Title:
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IMPURITY DIFFUSION METHOD, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| CANTOR COLBURN LLP |
| 20 CHURCH STREET |
| 22ND FLOOR |
| HARTFORD, CT 06103 |
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