Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/09/2014
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Application #:
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12366429
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Filing Dt:
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02/05/2009
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Publication #:
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Pub Dt:
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11/19/2009
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Inventors:
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Kouji Muramatsu, Osamu Tanitsu, Hirohisa Tanaka, Hiroyuki Hirota, Masaya Yamamoto et al
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Title:
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ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, COMPENSATION FILTER, AND EXPOSURE OPTICAL SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| STAAS & HALSEY LLP |
| ATTENTION: DAVIS M. PITCHER |
| 1201 NEW YORK AVE., N.W., 7TH FLOOR |
| WASHINGTON, D.C. 20005 |
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