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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8916793
Issue Dt:
12/23/2014
Application #:
13111334
Filing Dt:
05/19/2011
Publication #:
20120132397
Pub Dt:
05/31/2012
Inventors:
Hamid Tavassoli, Shane C. Nevil, Douglas A. Buchberger, Fernando M. Silveira et al
Title:
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW
Assignment: 1
Reel/Frame:
026753/0795Recorded: 08/11/2011Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SILVEIRA, FERNANDO M
Exec Dt:
07/25/2011
TAVASSOLI, HAMID
Exec Dt:
07/25/2011
ZHOU, XIAOPING
Exec Dt:
07/25/2011
NEVIL, SHANE C.
Exec Dt:
07/26/2011
BUCHBERGER, DOUGLAS A
Exec Dt:
07/25/2011
MAYS, BRAD L
Exec Dt:
06/07/2011
TSONG, TINA
Exec Dt:
08/08/2011
MAHADESWARASWAMY, CHETAN
Exec Dt:
07/15/2011
PATTAR, YASHASWINI B.
Exec Dt:
07/14/2011
NGUYEN, DUY D
Exec Dt:
07/25/2011
MERRY, WALTER R
Exec Dt:
06/28/2011
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
JAMES M. HOWARD
1279 OAKMEAD PARKWAY
SUNNYVALE, CA 94085-4040

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