Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/06/2015
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Application #:
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13404083
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Filing Dt:
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02/24/2012
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Publication #:
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Pub Dt:
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08/30/2012
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Inventors:
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Carlton Grant Willson, Tsuyoshi Ogawa, Michael W. Lin, Daniel J. Hellebusch et al
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Title:
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FLUORINATED SILAZANE RELEASE AGENTS IN NANOIMPRINT LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 201 WEST 7TH STREET |
| AUSTIN, TEXAS 78701 |
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| CANON NANOTECHNOLOGIES |
| PO BOX 81536 |
| AUSTIN, TX 78708 |
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