Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/13/2015
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Application #:
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13594768
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Filing Dt:
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08/24/2012
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Publication #:
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Pub Dt:
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02/27/2014
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Inventors:
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Zhigang Chen, Eric Hudson
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Title:
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Electronic Knob for Tuning Radial Etch Non-Uniformity at VHF Frequencies
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA GROUP, LLP |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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