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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	8952329	Issue Dt:	02/10/2015	Application #:	14045138	Filing Dt:	10/03/2013
Inventors:	I-Chang Shih, Yi-Jie Chen, Chia-Cheng Chang, Feng-Yuan Chiu, Ying-Chou Cheng et al
Title:	3D IMAGE PROFILING TECHNIQUES FOR LITHOGRAPHY

Assignment: 1

Reel/Frame:

031338/0713

Recorded: 10/03/2013

Pages: 12

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

SHIH, I-CHANG

Exec Dt:

09/30/2013

CHEN, YI-JIE

Exec Dt:

09/30/2013

CHANG, CHIA-CHENG

Exec Dt:

09/30/2013

CHIU, FENG-YUAN

Exec Dt:

09/30/2013

CHENG, YING-CHOU

Exec Dt:

10/01/2013

CHEN, CHIU HSIU

Exec Dt:

09/30/2013

YEH, BING-SYUN

Exec Dt:

09/30/2013

LIU, RU-GUN

Exec Dt:

09/30/2013

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

NO. 8, LI-HSIN RD. 6

HSIN-CHU SCIENCE PARK

HSIN-CHU, TAIWAN 300-77

Correspondent:

ESCHWEILER & ASSOCIATES, LLC.

629 EUCLID AVENUE, SUITE 1000

NATIONAL CITY BANK BUILDING

CLEVELAND, OH 44114

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