Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/17/2015
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Application #:
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13606162
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Filing Dt:
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09/07/2012
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Publication #:
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Pub Dt:
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03/14/2013
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Inventor:
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Yoshihiko NAGATA
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Title:
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PELLICLE FOR LITHOGRAPHY AND A METHOD OF MAKING THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OHTEMACHI 2-CHOME, |
| CHIYODA-KU, TOKYO, JAPAN 100-0004 |
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| MILLEN, WHITE, ZELANO & BRANIGAN, P.C. |
| 2200 CLARENDON BLVD., SUITE 1400 |
| ATTN: HELEN CASSIDY |
| ARLINGTON, VA 22201 |
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