Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/24/2015
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Application #:
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13073957
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Filing Dt:
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03/28/2011
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Publication #:
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Pub Dt:
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05/10/2012
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Inventor:
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Hiroyuki Takaba
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Title:
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METHOD OF DEPOSITING DIELECTRIC FILMS USING MICROWAVE PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| AUDUNN LUDVIKSSON |
| 2545 W. FRYE ROAD |
| SUITE 1 |
| CHANDLER, AZ 85224 |
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