Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/24/2015
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Application #:
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12698616
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Filing Dt:
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02/02/2010
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Publication #:
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Pub Dt:
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08/19/2010
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Inventors:
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Tatsuo MATSUDO, Chishio Koshimizu, Jun Abe
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Title:
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PLASMA PROCESSING APPARATUS AND TEMPERATURE MEASURING METHOD AND APPARATUS USED THEREIN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| MIHOKO SHIRAI |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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