Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/24/2015
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Application #:
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13783624
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Filing Dt:
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03/04/2013
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Publication #:
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Pub Dt:
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09/12/2013
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Inventors:
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Yasutoshi UMEHARA, Motoi OKADA, Shuji IWANAGA
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Title:
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PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ROTHWELL, FIGG, ERNST & MANBECK, P.C. |
| 607 14TH STREET, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20005 |
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