Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/07/2015
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Application #:
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14198145
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Filing Dt:
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03/05/2014
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Inventors:
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David K. Lam, Kevin M. Monahan, Theodore A. Prescop, Cong Tran
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Title:
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Matched Multiple Charged Particle Beam Systems For Lithographic Patterning, Inspection, and Accelerated Yield Ramp
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4008 BURTON DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| SETH A. HORWITZ |
| 14801 QUORUM DR., STE. 500 |
| DALLAS, TX 75254 |
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