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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
9001304
Issue Dt:
04/07/2015
Application #:
12838393
Filing Dt:
07/16/2010
Publication #:
20110013171
Pub Dt:
01/20/2011
Inventors:
Ulrich Mueller, Joachim Stuehler, Oswald Gromer, Rolf Freimann, Paul Kaufmann et al
Title:
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT DEVICE
Assignment: 1
Reel/Frame:
025087/0624Recorded: 10/04/2010Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MUELLER, ULRICH
Exec Dt:
08/04/2010
STUEHLER, JOACHIM
Exec Dt:
08/20/2010
GROMER, OSWALD
Exec Dt:
08/04/2010
FREIMANN, ROLF
Exec Dt:
08/05/2010
KAUFMANN, PAUL
Exec Dt:
08/06/2010
GEUPPERT, BERNHARD
Exec Dt:
08/04/2010
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVENUE NW, SUITE 800
WASHINGTON, DC 20037
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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