Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/14/2015
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Application #:
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12978922
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Filing Dt:
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12/27/2010
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Publication #:
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Pub Dt:
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06/28/2012
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Inventor:
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Jie Li
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Title:
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Simultaneous Measurement Of Multiple Overlay Errors Using Diffraction Based Overlay
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1550 BUCKEYE DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| MICHAEL J. HALBERT |
| 18805 COX AVE., STE. 220 |
| SARATOGA, CA 95070 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 16 JONSPIN ROAD |
| WILMINGTON, MASSACHUSETTS 01887 |
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| ELENI ZACHARI |
| 184 SHEPHERDS BUSH RD |
| LONDON, W67NL UNITED KINGDOM |
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