Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/21/2015
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Application #:
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12596303
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Filing Dt:
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03/03/2010
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Publication #:
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Pub Dt:
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07/15/2010
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Inventors:
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Koji Ishino, Hajime Nakamura, Mayako Matsuda, Takaaki Shindou, Yukio Kikuchi
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Title:
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DUMMY SUBSTRATE, AND START METHOD OF, RETENTION/MODIFICATION METHOD OF DEPOSITION CONDITION, AND STOP METHOD OF DEPOSITION APPARATUS USING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2500 HAGISONO |
| CHIGASAKI-SHI, JAPAN 253-8543 |
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| GROSSMAN, TUCKER, PERREAULT & PFLEGER, P |
| 55 SOUTH COMMERICAL STREET |
| MANCHESTER, NH 03101 |
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