Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/19/2015
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Application #:
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12756456
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Filing Dt:
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04/08/2010
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Publication #:
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Pub Dt:
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10/21/2010
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Inventor:
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Aurelian DODOC
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Title:
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MIRROR FOR THE EUV WAVELENGTH RANGE, PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY COMPRISING SUCH A MIRROR, AND PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY COMPRISING SUCH A PROJECTION OBJECTIVE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| GOERGE F. LEHNIGK |
| 2100 PENNSYLVANIA AVE N.W. |
| SUITE 600 |
| WASHINGTON, DC 20037 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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