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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
9046794
Issue Dt:
06/02/2015
Application #:
12883247
Filing Dt:
09/16/2010
Publication #:
20110043774
Pub Dt:
02/24/2011
Inventors:
Stefan HEMBACHER, Dieter Kraus, Stefan Koehler, Stefan Wiesner, Dirk Heinrich EHM et al
Title:
CLEANING MODULE, EUV LITHOGRAPHY DEVICE AND METHOD FOR THE CLEANING THEREOF
Assignment: 1
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878
Assignment: 2
Reel/Frame:
025538/0640Recorded: 12/27/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
HEMBACHER, STEFAN
Exec Dt:
11/30/2010
KRAUS, DIETER
Exec Dt:
11/26/2010
EHM, DIRK HEINRICH
Exec Dt:
11/29/2010
SCHMIDT, STEFAN-WOLFGANG
Exec Dt:
12/06/2010
KOEHLER, STEFAN
Exec Dt:
12/03/2010
CZAP, ALMUT
Exec Dt:
11/30/2010
WIESNER, STEFAN
Exec Dt:
12/08/2010
CHUNG, HIN YIU ANTHONY
Exec Dt:
11/24/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
GEORGE F. LEHNIGK
2100 PENNSYLVANIA AVE NW
SUITE 800
WASHINGTON, DC 20037

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